MFM2070U Digital Gas Flow Sensor DESCRIPTION
MFM2000 series is a gas flow sensor with low pressure drop capable of measuring medical gases up to 70 lpm. It is configured to be customizable with different flow inlet and outlet configurations.
MFM2070U Digital Gas Flow Sensor FEATURES
Low Pressure Drop Flow Sensor
High Accuracy +/-2.5% Reading
Calibrated and Temperature Compensated for Air
Low Power Consumption
Digital I2C
Made for Medical Applications
Calibrated for Air, and O2
MFM2070U Digital Gas Flow Sensor FLOW PERFORMANCE
Measurements performed with air at 23°C, 1 Atm, 50% RH, at 3.3V DC power supply, unless otherwise specified. Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.
Parameter | Condition | Min | Typical | Max | Unit |
Flow Range | Calibration gas: Air | 0.07 | 70 | SLM | |
Calibrated Temperature Range | 0 | 50 | °C | ||
Operating Temperature Range | -40 | 10 | 85 | °C | |
Storage Temperature Range | -40 | 105 | °C | ||
Accuracy | 25ºC | +/-2.5 | % Reading | ||
Temperature Error | 0-50ºC | 0.1 | reading/°C | ||
Resolution | I2C | 15 | bit | ||
Sampling Time | 7.5 | ms | |||
Power Consumption | @ Recommended Heater Power at zero Flow | 7.0 | mA | ||
PD | 650 | uA | |||
Pressure Drop | Max flow without mesh | 120 | Pa | ||
Max flow(with mesh screen) | 400 | Pa | |||
Operating Pressure Range | Absolute | 0.7 | 1.3 | Bar | |
Operating Overpressure | Absolute | +/-0.2 | Bar | ||
Averaging | 10 frames running window averaging | ||||
Wetted Materials | PES (Medical grade: biocompatible; ISO 10993 or USP Class VI), FR4, Silicon Nitrite, Silicon, Epoxy, Gold. | ||||
Standards | RoHS, REACH, ISO15001, ISO10993-1, ISO10993-5,UL94 V0, IEC |
Parameter | Condition | Min | Typical | Max | Unit |
Supply DC Voltage | DC | 2.7 | 3.3 | 5.5 | V |
Power Consumption |
@ Recommended Heater Power at zero Flo |
7.0 | mA | ||
PD | 650 | uA | |||
Data format Scaling Factor |
User read count value from register 0, then multiply by 2.5 to get actual flow rate in sccm |
2.5 | sccm |
Specification | Condition | Min | Typical | Max | Unit |
Burst Pressure | Over ambient | 1 | Bar |
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