Carbon Tetrafluoride CF4
CAS No.: 75-73-0EINECS No.: 200-896-5UN No.: UN1982Purity: 99.999%Dot Class: 2.2Appearance: ColorlessGrade Standard: Industrial Grade, Refrigerant Grade
Refrigerant:Tetrafluoromethane is sometimes used as a low temperature refrigerant.
Etching:It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
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