Piezoresistive Silicon Pressure Sensor for medium pressure ranges
SPM402 Series Piezoresistive Silicon Pressure Sensors General Description
The SPM 402 Series offers piezoresistive silicon, stainless steel pressure sensors. Media isolated sensors are designed to operate in hostile environments, yet provide the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.
The piezoresistive sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique pressure sensor design is at a minimum volume so the accuracy is greatly improved. The SPM 402 silicon pressure sensor is a thermally compensated device and has a millivolt output of up to 210mV at a 1mA supply current (or supply voltage 10V). This new pressure sensor offers design engineers excellent performance in various applications, especially for mid to high pressure and smaller solutions.
SPM402 Series Piezoresistive Silicon Pressure Sensors Features
Calibrated and compensated
With media separation
Excellent chemical resistance
O-ring mounting
Pressure ranges: 5 to 500 psi
SPM402 Series Piezoresistive Silicon Pressure Sensors Applications
Industrial
Pneumatic and hydraulic components (e.g. valves, pumps)
Level measuring (e.g. environmental technology)
Process industry
SPM402 Series Piezoresistive Silicon Pressure Sensors Specifications
All parameters are measured at supply current 1 mA at reference conditions unless otherwise specified.
Standard Pressure Ranges |
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PSI | bar | Output signal (Offset) [mV] | Output signal (Span) [mV] | Proof pressure [PSI/bar] | Negative pressure [PSI/bar] | Burst pressure [PSI/bar] | |||||||
min. | typ. | max. | min. | typ. | max. | ||||||||
5 | 0.35 | -2 | 0 | 2 | 50 | 75 | 100 | 30 | 2 | -- | -- | 45 | 3 |
15 | 1 | 100 | 145 | 210 | 75 | 5 | -- | -- | 112 | 7.5 | |||
30 | 2 | 95 | 150 | 200 | 150 | 10 | -- | -- | 225 | 15 | |||
50 | 3.5 | 80 | 125 | 180 |
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