Piezoresistive Silicon Pressure Sensor Module
SPA401 Series Pressure Sensors General Description
The SPA 401 Series offers piezoresistive silicon, stainless steel pressure sensors. Product highlights include excellent overpressure characteristics and chemical resistance. Media isolated sensors are designed to operate in hostile environments and yet give the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.
The sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique design of pressure sensor is at a minimum volume so the accuracy is greatly improved. The SPA 401 silicon pressure sensor is a thermally compensated device and has am amplified output with a ratiometric output signal (10% to 90% of supply voltage). This new pressure sensor offers design engineers excellent performance in various applications, especially for low pressure and smaller solutions.
SPA401 Series Pressure Sensors Features
1.5 to 100 PSI
-40 to 125°C Temperature Range
Calibrated and compensated Output
Supply voltage 2.7 to 5.5VDC
High accuracy (max 0.25% linearity and max 0.05% hysteresis)
SPA401 Series Pressure Sensors Applications
Industrial
Vacuum technology
Pneumatic and hydraulic components (e.g. valves, pumps)
Level measuring (e.g. environmental technology)
SPA401 Series Pressure Sensors Specifications
All parameters are measured at supply voltage 5V reference conditions unless otherwise specified
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Standard Pressure Ranges | |||||||||||
PSI | bar | Output signal (Offset) | Output signal (FSO) | Proof pressure [PSI/bar] | Negative pressure [PSI/bar] | Burst pressure [PSI/bar] | |||||
@ Vs = 5 V | @ Vs = 5 V | ||||||||||
1.5 | 0.1 | 10 % Vs | 0.5 V | 90 % Vs | 4.5 V | 15 | 1 | -15 | -1 | 22 | 1.5 |
3 | 0.2 | 30 | 2 | -15 | -1 | 45 | 3 | ||||
5 | 0.35 | 30 | 2 | -15 | -1 | 45 | 3 | ||||
15 | 1 | 75 | 5 | -15 | -1 | 112 | 7.5 | ||||
30 | 2 | 150 | 10 | -15 | -1 | 225 | 15 | ||||
50 | 3.5 | 250 | 17.5 | -15 | -1 | 375 | 25 | ||||
100 | 7 | 500 | 35 | -15 | -1 | 750 | 50 | ||||
Supply / Performance | |||||||||||
min. | typ. |
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